ASML reaches ‘first light’ milestone on first High NA EUV tool

By Thomson Reuters Feb 28, 2024 | 5:26 AM

AMSTERDAM (Reuters) – ASML has reached “first light” on its massive new High NA EUV lithography system, the Dutch semiconductor equipment maker confirmed on Wednesday, a milestone that means the tool is functioning though not at full performance.

The head of technology development at Intel, Ann Kelleher, first mentioned the progress during a talk at the SPIE lithography conference on Tuesday in San Jose.

ASML confirmed Kelleher’s remarks were accurate.

(Reporting by Toby Sterling; editing by Jason Neely)